Title:
PRESSURE DETECTOR
Document Type and Number:
Japanese Patent JPH04168333
Kind Code:
A
Abstract:
PURPOSE:To facilitate the formation of a cavity part of required dimensions by a method wherein a diaphragm comprising an unbaked ceramic material with a baking compression rate thereof smaller than material of a substrate is bonded on a peripheral part of the substrate and these parts are baked simultaneously. CONSTITUTION:A diaphragm 2 comprising an unbaked ceramic material and a substrate 1 comprising the unbaked ceramic material with a baking compres sion rate thereof larger than it are arranged at a peripheral part thereof and bonded to be baked integral. As a result, a desired cavity 6 can be formed between the diaphragm 2 and the substrate 1. Moreover, a ceramic thick film layer 3 for correction with the baking compression rate thereof adjustable is laminated on one or both of the diaphragm 2 and the substrate 1 and even when a material having a known baking compression rate is used for the dia phragm 2 and the substrate 1, the baking compression rate of the diaphragm 2 and the substrate 1 can be adjusted finely in a very wide range by altering a thickness of the thick film layer 3 properly. This facilitates the formation of a cavity 6 of required dimensions thereby allowing significant simplification of a production process.
Inventors:
KOJIMA TAKAO
KITSUKAWA KANEHISA
YASUDA TOSHIKATSU
MIZUMOTO KATSUYOSHI
KITSUKAWA KANEHISA
YASUDA TOSHIKATSU
MIZUMOTO KATSUYOSHI
Application Number:
JP29209390A
Publication Date:
June 16, 1992
Filing Date:
October 31, 1990
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
G01L9/04; G01L9/00; G01L9/12; (IPC1-7): G01L9/04; G01L9/12
Attorney, Agent or Firm:
Shigeru Yagita (3 outside)