Title:
【発明の名称】圧力変動減衰システム
Document Type and Number:
Japanese Patent JP2002540518
Kind Code:
A
Abstract:
A pressure booster and method for amplifying a water pressure that is supplied by water facility is provided. The pressure booster is configured to be connected between he water facility and one or more semiconductor substrate cleaning systems. The pressure booster includes a pump having a pump input that connects to the water facility and a pump output that is configured to produce a fluctuating amplified water pressure that is greater than the water pressure that is supplied by the water facility. Further included is a pressure dampener having a dampener input for accepting the fluctuating amplified water pressure from the pump output. The pressure dampener is configured to partially reduce pressure fluctuations in the fluctuating amplified water pressure. The pressure dampener also has a dampener output. A pressure regulator having a regulator input for receiving the dampener output is also included as part of the pressure booster. The pressure regulator has a regulator output that is configured to supply an amplified water pressure having a substantially reduced pressure fluctuation, and an adjustment control that is connected to the pressure regulator. The adjustment control is provided to enable precision turning of the pressure fluctuations at the output of the pressure regulator, such that a substantially more stable water supply can be provided to the cleaning system(s) connected to the pressure booster.
Inventors:
Won Larry Pin-Kwan
Application Number:
JP2000607777A
Publication Date:
November 26, 2002
Filing Date:
February 22, 2000
Export Citation:
Assignee:
LAM RESEARCH CORPORATION
International Classes:
F17D3/01; F04B11/00; F04B53/00; G05D16/02; (IPC1-7): G05D16/02; F17D3/01
Attorney, Agent or Firm:
Meisei International Patent Office