Title:
圧力計
Document Type and Number:
Japanese Patent JP6796352
Kind Code:
B2
Abstract:
A pressure gauge (IA, 1B) includes: an outer container (20) defining an outer chamber (21) set to a reference pressure (Pr); an inner container (30) disposed in the outer container (20); and a tube (10) setting the inside of a first inner chamber (31) of the inner container (30) to a measurement pressure (Px). The inner container (30) includes: a cylindrical rigid wall portion (33); first and second pressure receiving plates (34A, 34B) that displace due to a differential pressure between the reference pressure and the measurement pressure; a bellows (38) partitioning the inner container (30) into the first inner chamber and a second inner chamber (32); and a pressure detection element (39) disposed in the second inner chamber and detecting the measurement pressure based on the displacements of the first and the second pressure receiving plates. The outer chamber and the second inner chamber are set to the reference pressure of a high vacuum that is lower than a lower limit of the measurement pressure.
Inventors:
Hisao Hojo
Application Number:
JP2020528187A
Publication Date:
December 09, 2020
Filing Date:
October 17, 2018
Export Citation:
Assignee:
q'z corporation
International Classes:
G01L19/04; G01L7/06; G01L9/08; G01L21/00
Domestic Patent References:
| JP2010203977A | ||||
| JP2011013190A | ||||
| JP2228585A | ||||
| JP55078231A | ||||
| JP2007057395A |
Foreign References:
| WO2018127987A1 | ||||
| US4691574 | ||||
| US4655087 |
Attorney, Agent or Firm:
Inoue Ichi
Takekoshi Noboru
Yasushi Kuroda
Takekoshi Noboru
Yasushi Kuroda