To provide a pressure measurement device and its pressure measurement method related to a vacuum chamber, more specifically, one using ultrasonic waves, in the vacuum chamber pressure measurement system.
The device comprises the vacuum chamber 10 in which a predetermined vacuum level is formed in interior, an ultrasonic wave emission means which is attached to the surface of the vacuum chamber 10 emits ultrasonic wave 62 into the interior of the vacuum chamber 10, an ultrasonic wave receiving means for receiving a reflected wave 64, in which the ultrasonic wave 62 emitted from the ultrasonic emission means is reflected by the vacuum chamber 10 by colliding; a reflected wave detection means which detects the reflected wave 64 from the ultrasonic wave receiving means; and an amplitude analysis means which analyzes the amplitude from the reflected wave 64 detected from the reflected wave detection means.
SHIN YONG-HYEON
JUNG KWANG HWA
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa
Ryo Hashimoto
Tetsuya Kazama
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