PRESSURE MEASURING DEVICE AND METHOD

Title:

PRESSURE MEASURING DEVICE AND METHOD

Document Type and Number:

Japanese Patent JP2008209284

Kind Code:

A

Abstract:

To provide a pressure measuring device 185 capable of determining a gas pressure accurately.

The device includes a Pirani vacuum gage 10 for outputting an electric signal corresponding to the gas pressure; an operation device (CPU) for calculating a conversion formula for determining the gas pressure from an output from the Pirani vacuum gage 1; and the second pressure gage 100 arranged close to the Pirani vacuum gage, for measuring the gas pressure. The second pressure gage 100 measures the gas pressure in a narrower range than a pressure measuring range of the Pirani vacuum gage 10, and the operation device (CPU) calculates the conversion formula applicable to the whole pressure measuring range of the Pirani vacuum gage 10 by using gas pressure measurement results by the second pressure gage.

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Inventors:

TAKAHASHI NAOKI
MURATA TOMOYUKI
OKUNO TORU

Application Number:

JP2007047101A

Publication Date:

September 11, 2008

Filing Date:

February 27, 2007

Export Citation:

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Assignee:

ULVAC CORP

International Classes:

G01L21/00; G01L21/12

Domestic Patent References:

JPS58167435U	1983-11-08
JPH03233336A	1991-10-17
JPS61173043U	1986-10-28
JP2006153672A	2006-06-15

Attorney, Agent or Firm:

Masatake Shiga
Masakazu Aoyama
Shingo Suzuki

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