Title:
PRESSURE MEASURING DEVICE AND PRESSURE MEASURING METHOD
Document Type and Number:
Japanese Patent JP2009300404
Kind Code:
A
Abstract:
To provide a pressure measuring device excellent in maintainability by change with time, producible inexpensively, and capable of accurately detecting a pressure in a wide pressure range from a normal pressure to high vacuum.
A voltage value V (output) corresponding to a gas pressure output from a Pirani vacuum gage is input into an operation part 4 through a driver 2. In the operation part 4, when the input voltage value is lower than a threshold on reference to the threshold set beforehand, a pressure is calculated by using a mathematical expression 3 stored in a memory 7. When the input voltage value is higher than the threshold, the pressure is calculated by using a mathematical expression 4 stored in the memory 7.
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Inventors:
TAKAHASHI NAOKI
MURATA TOMOYUKI
OKUNO TORU
MURATA TOMOYUKI
OKUNO TORU
Application Number:
JP2008158472A
Publication Date:
December 24, 2009
Filing Date:
June 17, 2008
Export Citation:
Assignee:
ULVAC CORP
International Classes:
G01L21/12
Domestic Patent References:
| JP2004132698A | 2004-04-30 | |||
| JP2008111778A | 2008-05-15 | |||
| JPH1144601A | 1999-02-16 | |||
| JP2000124465A | 2000-04-28 | |||
| JPH10267776A | 1998-10-09 |
Foreign References:
| WO2006057148A1 | 2006-06-01 | |||
| US5557972A | 1996-09-24 |
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki