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Title:
PRESSURE REDUCING EXHAUST VALVE, AND PRESSURE REDUCING DEVICE USING PRESSURE REDUCING EXHAUST MECHANISM INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2009287582
Kind Code:
A
Abstract:

To provide a pressure reducing exhaust valve applicable to a pressure reducing device having only one exhaust passage (a main exhaust passage) for increasing an air exhausting speed while suppressing the soaring of particles, and also to provide the pressure reducing device using a pressure reducing exhaust mechanism including the same.

The pressure reducing exhaust valve 10 has one end communicated with a vacuum chamber, and the other end mounted in the exhaust passage communicated with the vacuum chamber. The valve 10 is also provided with: a pipe part 11 connected to the exhaust passage; an on-off valve 12 stored in the pipe part for opening/closing the exhaust passage 5; and a porous body part 13 with vent pores provided in the on-off valve 12.


Inventors:
SAITO NORIHIKO
IWASAKI TAKESHI
HASHIMOTO YUTAKA
Application Number:
JP2008137402A
Publication Date:
December 10, 2009
Filing Date:
May 27, 2008
Export Citation:
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Assignee:
COVALENT MATERIALS CORP
International Classes:
F16K47/04; C23C14/00; C23C16/44; F16K1/22; F16K51/02; H01L21/3065
Domestic Patent References:
JPH03157585A1991-07-05
JPS53119430A1978-10-18
JP2002121086A2002-04-23
JP2001130978A2001-05-15
JP2005331154A2005-12-02
JPS61228648A1986-10-11
JPH07235497A1995-09-05
JP2009022916A2009-02-05
JP2000264753A2000-09-26
JP2003238267A2003-08-27
JP2003329169A2003-11-19
JPH1140549A1999-02-12
JPH06224097A1994-08-12
JPS56153165A1981-11-27
JP2002195696A2002-07-10
Attorney, Agent or Firm:
Kinoshita Shigeru
Rie Ishimura



 
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