To provide a pressure reducing exhaust valve which is applicable to a pressure reducing device having only one exhaust passage (a main exhaust passage), fast in exhaust velocity and capable of suppressing the soaring of particles, and also to provide a pressure reducing device using a pressure reducing exhaust mechanism including the same.
The pressure reducing exhaust valve 10 is attached in a portion of the exhaust passage with one end communicated with a vacuum chamber and the other end with the vacuum pump. The valve 10 also includes a pipe part 11 connected to an exhaust passage and a butterfly valve 12 which is formed in a flat shape and supported by a support shaft 14 in the pipe part 11 to open and close the exhaust passage by revolving around the shaft center of the support shaft. The butterfly valve 12 is formed of a porous member with vent pores over its entire portion.
IWASAKI TAKESHI
HASHIMOTO YUTAKA
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Rie Ishimura