Title:
PRESSURE SENSOR CHIP
Document Type and Number:
Japanese Patent JP2015194344
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To achieve a measurement range of differential pressure multiplied.SOLUTION: An annular diaphragm is provided being divided in a state of surrounding a differential pressure diaphragm 1, and one is used as a static pressure diaphragm 2 and the other is used as a static pressure diaphragm 3. The other surface (undersurface) of the static pressure diaphragm 2 is used as a reference pressure, and a measured pressure Pa toward one surface of the differential pressure diaphragm 1 is branched and guided to one surface (upper surface) of the static pressure diaphragm 2. With one surface of the static pressure diaphragm 3 used as a reference pressure, a measured pressure Pb toward the other surface of a differential pressure diaphragm 1 is branched and guided to the other surface of the static pressure diaphragm 3. A differential pressure ΔP obtained from the differential pressure diaphragm 1 is outputted as a differential pressure of a low pressure range ΔP, and a differential pressure ΔPab between a static pressure Pa obtained from the static pressure diaphragm 2 and a static pressure Pb obtained from the static pressure diaphragm 3 is outputted as a differential pressure of a high pressure range ΔP.
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Inventors:
TOKUDA TOMOHISA
Application Number:
JP2014071070A
Publication Date:
November 05, 2015
Filing Date:
March 31, 2014
Export Citation:
Assignee:
AZBIL CORP
International Classes:
G01L13/02
Domestic Patent References:
| JP3847281B2 | 2006-11-22 | |||
| JP5227729B2 | 2013-07-03 | |||
| JP3238001B2 | 2001-12-10 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa