PRESSURE SENSOR CHIP

Title:

PRESSURE SENSOR CHIP

Document Type and Number:

Japanese Patent JP2015194346

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To achieve a measurement range of a differential pressure multiplied.SOLUTION: An annular diaphragm is provided as a high pressure differential pressure diaphragm 2 in a state of surrounding a low pressure differential pressure diaphragm 1, and a measured pressure Pa of one surface toward a low pressure differential pressure diaphragm 1 is branched and guided to one surface (upper surface) of the high pressure differential pressure diaphragm 2, and a measured pressure Pb of the other surface toward the low presser differential pressure diaphragm 1 is branched and guided to the other surface (undersurface) of the high pressure differential pressure diaphragm 2. A pressure difference ΔP obtained from the low pressure differential pressure diaphragm 1 is outputted as a differential pressure of a low pressure range ΔP, and the pressure difference ΔP obtained from the high pressure differential pressure diaphragm 2 is outputted as a differential pressure of a high pressure range ΔP.

Inventors:

TOKUDA TOMOHISA

Application Number:

JP2014071072A

Publication Date:

November 05, 2015

Filing Date:

March 31, 2014

Export Citation:

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