Title:
PRESSURE SENSOR CHIP
Document Type and Number:
Japanese Patent JP2017106812
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a pressure sensor chip that offers dramatic improvement in pressure rating as well as mitigated or suppressed degradation in machinability and response speed.SOLUTION: A pressure guide hole 11-2d formed through a stopper member has a cruciform hole shape made up of a central portion H0 positioned at the center of the cruciform and extending portions H1-H4 continuously extending in four directions from a circumference of the central portion H0. Width W of the hole shape contributes to pressure rating and length L thereof contributes to responsiveness and machinability.SELECTED DRAWING: Figure 1
Inventors:
TOKUDA TOMOHISA
ISHIKURA YOSHIYUKI
ISHIKURA YOSHIYUKI
Application Number:
JP2015240810A
Publication Date:
June 15, 2017
Filing Date:
December 10, 2015
Export Citation:
Assignee:
AZBIL CORP
International Classes:
G01L19/06; G01L13/02; H01L29/84
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa
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