Title:
Pressure sensor chip
Document Type and Number:
Japanese Patent JP5970017
Kind Code:
B2
Abstract:
A pressure sensor chip according to the present invention includes two static-pressure diaphragms (2, 3) formed by dividing an annular diaphragm arranged so as to surround a differential-pressure diaphragm (1). A reference pressure is applied to one surface of one static-pressure diaphragm (2), and a measurement pressure (Pa) for one surface of the differential-pressure diaphragm (1) is transmitted to the other surface of the static-pressure diaphragm (2) along a branched path. A reference pressure is applied to one surface of the other static-pressure diaphragm (3), and a measurement pressure (Pb) for the other surface of the differential-pressure diaphragm (1) is transmitted to the other surface of the static-pressure diaphragm (3) along a branched path. Accordingly, multiple differential-pressure measurement ranges can be provided.
Inventors:
Tokuhisa Tomohisa
Application Number:
JP2014071070A
Publication Date:
August 17, 2016
Filing Date:
March 31, 2014
Export Citation:
Assignee:
Azbil Co., Ltd.
International Classes:
G01L13/02; G01L15/00; G01L19/06
Domestic Patent References:
| JP3847281B2 | ||||
| JP5227729B2 | ||||
| JP3238001B2 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa