Title:
PRESSURE SENSOR DEVICE
Document Type and Number:
Japanese Patent JP3847281
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a pressure sensor device having a simple structure and capable of being miniaturized, in which the excessive pressure protection operational pressure for a sensor chip can be made sufficiently high.
SOLUTION: The pressure sensor device is provided with a sheet-like diaphragm on whose surface a strain resistance gauge is formed and a stopper member having a recessed part consisting of a curved surface along the displacement of the diaphragm, in which the recessed part is provided so as to be disposed opposite the diaphragm. In particular, the curved surface of the recessed part is formed as the recessed surface in which the depth (y) at the distance (x) from the center of the diaphragm, with respect to the excessive pressure protection operational pressure (p), is expressed by a quartic function of [y=pr4(1-x2/r2)2/64D], where (r) is the radius of the diaphragm, (t) is the thickness, and D is flexural stiffness.
Inventors:
Masayuki Yoneda
Jun Mizoguchi
Yasuhiro Kajio
Masaya Ishikawa
Yoichi To
Tsuchiya Naohisa
Jun Mizoguchi
Yasuhiro Kajio
Masaya Ishikawa
Yoichi To
Tsuchiya Naohisa
Application Number:
JP2003296695A
Publication Date:
November 22, 2006
Filing Date:
August 20, 2003
Export Citation:
Assignee:
YAMATAKE CORPORATION
International Classes:
G01L13/06; G01L9/00; G01L19/06; G01L9/04; H01L29/84; (IPC1-7): G01L9/04; H01L29/84
Domestic Patent References:
| JP58180927A | ||||
| JP52043474A | ||||
| JP62167426A |
Attorney, Agent or Firm:
Koji Nagato