To provide a pressure sensor capable of easily and exactly diagnosing clogging of a pressure guide tube without being affected by flow rate of the process and diagnostic method for clogging of the pressure sensor.
The pressure sensor detecting high pressure side pressure from a high pressure side pressure guide tube and low pressure side pressure from a low pressure side pressure guide tube comprises a high pressure side pressure operator calculating the high pressure side pressure signal from the high pressure side pressure, a high pressure side pressure swing operator calculating high pressure side pressure swing from the high pressure side pressure signal, a high pressure side pressure dispersion operator calculating high pressure side pressure dispersion from the high pressure side pressure swing, a low pressure side pressure operator calculating the low pressure side pressure signal from the low pressure side pressure, a low pressure side pressure swing operator calculating low pressure side pressure swing from the low pressure side pressure signal, a low pressure side pressure dispersion operator calculating low pressure side pressure dispersion from the low pressure side pressure swing, a ratio operator calculating a diagnostic variable concerning the ratio between the high pressure side pressure dispersion and the low pressure side pressure dispersion and a judging part judging clogging of the high pressure side pressure guide tube or the clogging of the low pressure side pressure guide tube based on the values of diagnostic variable.
WAKUI TETSUYA
MIYAJI NOBUO
HASHIZUME TAKUMI
WAKUI TETSUYA
| JP2005274501A | 2005-10-06 | |||
| JP2004132817A | 2004-04-30 | |||
| JPS6410141A | 1989-01-13 | |||
| JPS60186725A | 1985-09-24 |