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Title:
PRESSURE SENSOR AND FLOW DETECTION DEVICE
Document Type and Number:
Japanese Patent JP2010266395
Kind Code:
A
Abstract:

To provide a pressure sensor capable of detecting accurately a liquid pressure without being influenced by a liquid temperature even if the liquid temperature is high, by utilizing effectively a constitution for converting the liquid pressure into an air pressure and detecting it, and to provide a flow detection device utilizing the pressure sensor.

A liquid pressure chamber L1 and an air pressure chamber R1 are formed in a base H1 mutually oppositely through both diaphragms 22, 24. In this case, a liquid pressure of a chemical fluid flowing into the liquid pressure chamber L1 works onto a diaphragm 22, and an air pressure of the air flowing into the air pressure chamber R1 works onto a diaphragm 24. A piezoelectric conversion unit 50 is provided on the base H1, and the air pressure fluctuating corresponding to displacement of both diaphragms 22, 24 resulting from fluctuation of the liquid pressure is detected as the liquid pressure of the chemical fluid.

COPYRIGHT: (C)2011,JPO&INPIT


Inventors:
SASAO KIMIHITO
Application Number:
JP2009119737A
Publication Date:
November 25, 2010
Filing Date:
May 18, 2009
Export Citation:
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Assignee:
ADVANCE DENKI KOGYO KK
International Classes:
G01L11/00; G01L19/04
Domestic Patent References:
JPS5937436A1984-02-29
JP5203880B22013-06-05
JPS6438522U1989-03-08
Foreign References:
GB1195429B
WO2009001631A12008-12-31
FR112398A
Attorney, Agent or Firm:
間瀬 ▲けい▼一郎
Minoru Yamada



 
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