To provide a pressure sensor capable of detecting accurately a liquid pressure without being influenced by a liquid temperature even if the liquid temperature is high, by utilizing effectively a constitution for converting the liquid pressure into an air pressure and detecting it, and to provide a flow detection device utilizing the pressure sensor.
A liquid pressure chamber L1 and an air pressure chamber R1 are formed in a base H1 mutually oppositely through both diaphragms 22, 24. In this case, a liquid pressure of a chemical fluid flowing into the liquid pressure chamber L1 works onto a diaphragm 22, and an air pressure of the air flowing into the air pressure chamber R1 works onto a diaphragm 24. A piezoelectric conversion unit 50 is provided on the base H1, and the air pressure fluctuating corresponding to displacement of both diaphragms 22, 24 resulting from fluctuation of the liquid pressure is detected as the liquid pressure of the chemical fluid.
COPYRIGHT: (C)2011,JPO&INPIT
JPS5937436A | 1984-02-29 | |||
JP5203880B2 | 2013-06-05 | |||
JPS6438522U | 1989-03-08 |
GB1195429B | ||||
WO2009001631A1 | 2008-12-31 | |||
FR112398A |
Minoru Yamada