Title:
PRESSURE SENSOR AND GAS FLOW METER USING IT
Document Type and Number:
Japanese Patent JPH04147027
Kind Code:
A
Abstract:
PURPOSE:To enable flow to be detected highly accurately by forming two piezoelectric element-holding surfaces in a pair which hold a piezoelectric element on a slant surface. CONSTITUTION:A piezoelectric element 102 is formed as merely a circular flat film before assembly. Also, with two holders 108 and 109 in a pair, piezoelec tric element holding surfaces 108a and 109a are formed in a same direction on a slanted surface at a same angle. Therefore, when the element 102 is held by the holders 108 and 109, a circular edge part of the element 102 is forced to be deformed along the slanted surfaces 108a and 109a and the entire element 102 is extended in diaphragm state, thus enabling the element 102 to be produced easily and flow to be detected highly accurately with high sensitivity.
Inventors:
TAKEDA SHUZO
KATO TOMIO
HASHIMOTO NOBUO
KATO TOMIO
HASHIMOTO NOBUO
Application Number:
JP27098890A
Publication Date:
May 20, 1992
Filing Date:
October 09, 1990
Export Citation:
Assignee:
TORAY INDUSTRIES
International Classes:
G01F1/20; G01L9/08; G01L13/06; G01F1/32; (IPC1-7): G01F1/20; G01F1/32; G01L9/08
Attorney, Agent or Firm:
Toshimitsu Ban