Title:
PRESSURE SENSOR, PRESSURE GAUGE, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2013156197
Kind Code:
A
Abstract:
To provide a pressure sensor, a pressure gauge, and an electronic apparatus which have high accuracy, high reliability, and especially high moisture resistance without pressure sensitivity changing according to the change in environmental conditions.
A pressure sensor 10 includes: a pressure sensitive element 40; a supporting member 30 to which the pressure sensitive element 40 is fixed; and bellows each of which has an opening part on one end and a through port on the other end. Adhesive joints 70 between the bellows and the supporting member 30 are side faces of the bellows, which are parallel in a displacement direction of the bellows.
Inventors:
UCHIMURA GO
Application Number:
JP2012018059A
Publication Date:
August 15, 2013
Filing Date:
January 31, 2012
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01L7/06; G01L9/00; G01L13/02
Attorney, Agent or Firm:
Yuichi Murakami
Takahiro Deguchi
Takahiro Deguchi
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