Title:
PRESSURE SENSOR AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH04328436
Kind Code:
A
Abstract:
PURPOSE:To obtain a pressure sensor which can decrease the pressure detecting errors caused by the temperature change of oil in an oil chamber and can improve the productivity. CONSTITUTION:An oil chamber 7 is formed between a pressure sensor element 5 and a diaphragm 4 in a pressure sensor 1. The pressure which is detected with the diaphragm 4 is transferred into a silicon pressure sensor chip 5e of the pressure sensor element 5 through the oil in the oil chamber 7. One end part of a metal ring 3 forming the upper oil chamber 7 is curled and bonded to the outer surface of the diaphragm 4. The other end part is coupled and fixed to the outer surface of the pressure sensor element 5 in the oil 7. Thus, the oil-sealed oil chamber 7 having the small volume is formed between the diaphragm 4 and the pressure sensor element 5.
Inventors:
KAWAGUCHI AKIMITSU
Application Number:
JP12534791A
Publication Date:
November 17, 1992
Filing Date:
April 26, 1991
Export Citation:
Assignee:
EAGLE IND CO LTD
International Classes:
G01L19/00; G01L9/00; G01L9/04; (IPC1-7): G01L19/00
Attorney, Agent or Firm:
Mikio Nakabayashi