Title:
PRESSURE SENSOR MANUFACTURING METHOD AND PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2016011875
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To improve accuracy in measuring gas pressure.SOLUTION: A manufacturing method for a sensor module 10, which heats an electric resistor 20 exposed to gas and outputs a change in temperature of the electric resistor 20 generated according to gas pressure as a change in a resistance value of the electric resistor 20, includes: a first step of forming an insulator layer 14 as an oxide film or nitride film on a substrate 11; and a second step of forming a conductor layer 21 as the electric resistor on the insulator layer 14 under the condition that temperature is in a range of from 300 degrees to 600 degrees.
Inventors:
MINAMI TOMOHIDE
Application Number:
JP2014133255A
Publication Date:
January 21, 2016
Filing Date:
June 27, 2014
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G01L21/12
Domestic Patent References:
JP2009300381A | 2009-12-24 | |||
JPH0869858A | 1996-03-12 | |||
JP2007243173A | 2007-09-20 | |||
JP2007294870A | 2007-11-08 |
Foreign References:
US5347869A | 1994-09-20 |
Attorney, Agent or Firm:
Hiroaki Sakai
Previous Patent: IMAGE PROCESSOR AND METHOD THEREOF
Next Patent: PRESSURE SENSOR AND PRESSURE SENSOR MANUFACTURING METHOD
Next Patent: PRESSURE SENSOR AND PRESSURE SENSOR MANUFACTURING METHOD