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Title:
PRESSURE SENSOR FOR MEASURING PRESSURE IN MEDIUM
Document Type and Number:
Japanese Patent JP2010038916
Kind Code:
A
Abstract:

To provide a pressure sensor module with improved robustness to acidic conditions.

The pressure sensor module includes a sensing element 1 mounted on a front side 3 of a support member 5. The support member 5 includes a hole 7 through the support member 5 from the front side 3 to a back side 9. The sensing element 1 covers the hole 7 at the front side 3. A back side barrier 6 provided at the back side 9 of the support member 5 surrounds a surface of the back side 9 of the support member 5 and forms an enclosed area 8. The enclosed area 8 and the hole 7 form a pressure channel 10. A back side protective member 2 fills the hole 7 and at least partially the enclosed area 8. The support member 5, the back side barrier 6, and the back side protective member 2 form a module that can be placed during production of the pressure sensor in a housing of the pressure sensor.


Inventors:
MULLIGAN SEAN P
MORSINK FRANK
BEA JUN
SPIJKSMA GERALD
TE BOEKHORST TOM
Application Number:
JP2009176336A
Publication Date:
February 18, 2010
Filing Date:
July 29, 2009
Export Citation:
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Assignee:
SENSATA TECHNOLOGIES INC
International Classes:
G01L13/06; H01L29/84
Domestic Patent References:
JP2007107993A2007-04-26
JPH09304208A1997-11-28
JP2002350264A2002-12-04
JPH0494536U1992-08-17
JP2006047190A2006-02-16
JP2007003449A2007-01-11
JPH09304208A1997-11-28
JPS6249231A1987-03-03
JPH112578A1999-01-06
JP2006343276A2006-12-21
JPH0494536U1992-08-17
JP2007107993A2007-04-26
Attorney, Agent or Firm:
Kyozo Katayose



 
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