Title:
PRESSURE SENSOR, MICROPHONE, ULTRASONIC SENSOR, BLOOD PRESSURE SENSOR, AND TOUCH PANEL
Document Type and Number:
Japanese Patent JP2015224903
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a high-sensitivity pressure sensor.SOLUTION: A pressure sensor according to an embodiment includes a substrate, a support portion, a film portion, and magnetoresistive elements. The support portion is bonded to the substrate using a first adhesive member and second adhesive member having different Young's moduli. The film portion is supported by the support portion and is flexible. The magnetoresistive elements are provided on the film portion and comprise a first magnetic layer, a second magnetic layer, and a spacer layer located between the first magnetic layer and second magnetic layer.
Inventors:
MASUNISHI KATSURA
FUKUZAWA HIDEAKI
FUJI YOSHIHIKO
YUZAWA AKIKO
OKAMOTO KAZUAKI
FUKUZAWA HIDEAKI
FUJI YOSHIHIKO
YUZAWA AKIKO
OKAMOTO KAZUAKI
Application Number:
JP2014108502A
Publication Date:
December 14, 2015
Filing Date:
May 26, 2014
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01L1/12; G01L9/16; G06F3/041; H01L29/84; H01L43/08; H04R23/00
Attorney, Agent or Firm:
Kurata Masatoshi
Yoshihiro Fukuhara
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tadashi Inoue
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Yoshihiro Fukuhara
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tadashi Inoue
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
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