Title:
圧力センサ及びマイクロフォン
Document Type and Number:
Japanese Patent JP5701807
Kind Code:
B2
Abstract:
According to one embodiment, a pressure sensor includes a base, and a first sensor unit. The first sensor unit includes a first transducer thin film, a first strain sensing device and a second strain sensing device. The first strain sensing device includes a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first and the second magnetic layers. The second strain sensing device is provided apart from the first strain sensing device on the first membrane surface and provided at a location different from a location of the barycenter, the second strain sensing device including a third magnetic layer, a fourth magnetic layer, and a second intermediate layer provided between the third and the fourth magnetic layers, the first and the second intermediate layers being nonmagnetic. The first and the second strain sensing devices, and the barycenter are in a straight line.
Inventors:
Hideaki Fukuzawa
Akihiko Ebado
Osamu Nishimura
Michiko Hara
Hiromi Yuasa
Yoshihiko Fuji
Masayuki Kii
Eizo Fujisawa
Akihiko Ebado
Osamu Nishimura
Michiko Hara
Hiromi Yuasa
Yoshihiko Fuji
Masayuki Kii
Eizo Fujisawa
Application Number:
JP2012078361A
Publication Date:
April 15, 2015
Filing Date:
March 29, 2012
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01L9/16; H04R15/00
Domestic Patent References:
| JP2009164851A | ||||
| JP60253830A | ||||
| JP60046049U | ||||
| JP7174645A | ||||
| JP61096347U |
Foreign References:
| US20060246271 | ||||
| US4217783 |
Attorney, Agent or Firm:
Masahiko Hinataji