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Patent Searching and Data


Title:
PRESSURE SENSOR MODULE
Document Type and Number:
Japanese Patent JP2017166871
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a pressure sensor module with which it is possible to prevent a change over time of the deformation characteristic of a diaphragm when maintaining the position of the diaphragm using a presser body.SOLUTION: The pressure sensor module comprises: a base 12 including a concave part 26A and a receiving surface part 28A extending from an open edge of the concave part 26A to the outside; a diaphragm body 14A forming a pressure chamber 32A between the concave part 26A and itself; a pressure sensor element 16 for detecting pressure propagated via the diaphragm body 14A and the pressure chamber 32A from a space opposite the pressure chamber 32A across the diaphragm body 14A; and a presser body 18A for holding the position of the diaphragm body 14A against the base 12. The diaphragm body 14A has a thin part 42 capable of electrically flexural deformation in a thickness direction X and a thick part 44 provided on the outer circumference of the thin part 42 and provided at a position facing the receiving surface part 28A.SELECTED DRAWING: Figure 4

Inventors:
KANEKO YASUAKI
OTA MASAKI
UEKI KIYOTAKA
TSUDA HITOSHI
Application Number:
JP2016050177A
Publication Date:
September 21, 2017
Filing Date:
March 14, 2016
Export Citation:
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Assignee:
TGK CO LTD
International Classes:
G01L13/02
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki