PRESSURE SENSOR WITH DIFFERENTIAL CAPACITIVE OUTPUT

Title:

PRESSURE SENSOR WITH DIFFERENTIAL CAPACITIVE OUTPUT

Document Type and Number:

Japanese Patent JP2014048292

Kind Code:

A

Abstract:

To provide a pressure sensor with a differential capacitive output.

A MEMS pressure sensor device is provided that can provide both a linear output with regard to external pressure and a differential capacitance output so as to improve the signal amplitude level. These benefits are provided through use of a rotating proof mass that generates capacitive output from electrodes configured at both ends of the rotating proof mass. A sensor output can then be generated using a difference between the capacitances generated from these ends of the rotating proof mass. An additional benefit of such a configuration is that the differential capacitance output changes in a more linear fashion with respect to external pressure changes than does a capacitive output from traditional MEMS pressure sensors.

Inventors:

MCNEIL ANDREW C
LIN YIZHEN

Application Number:

JP2013176866A

Publication Date:

March 17, 2014

Filing Date:

August 28, 2013

Export Citation:

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Assignee:

FREESCALE SEMICONDUCTOR INC

International Classes:

B60C23/04; G01L9/00; B81B3/00; G01L13/06; H01L29/84

Domestic Patent References:

JPH0365850B2	1991-10-15
JP5638598B2	2014-12-10
JP6053357B2	2016-12-27

Attorney, Agent or Firm:

Tadashige Ito
Tadahiko Ito
Shinsuke Onuki

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