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Patent Searching and Data


Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH06201419
Kind Code:
A
Abstract:

PURPOSE: To provide a pressure sensor in which deterioration of the elasticity of membrane is retarded and durability is enhanced by eliminating the effect of external vibration through subtraction and eliminating noise without vibrating the membrane and thereby ensuring noise elimination capacity which is not affected by the difference between individual membranes caused by manufacturing process or aging.

CONSTITUTION: The pressure sensor 10 for fluid vibration type flowmeter employing a fluidic element 17 comprises two membranes 32a, 32b having high airtightness arranged on a coplane or parallel planes and discriminate pressures in pressure conduction holes 24a, 24b made at positions on the fluidic element 17 symmetrical to the flow direction, and pressure conduction paths reaching from the pressure conduction holes 24a, 24b to one sides of the membranes. Both membranes 32a, 32b are deformed in opposite directions by the pressure difference of the pressure conduction holes 24a, 24b wherein the length and the volume of the pressure conduction path between the surface of the membrane and the pressure conduction hole are set equal for both membranes 32a, 32b.


Inventors:
MATSUBARA KENICHI
Application Number:
JP35955392A
Publication Date:
July 19, 1994
Filing Date:
December 25, 1992
Export Citation:
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Assignee:
TOKYO GAS CO LTD
International Classes:
G01F1/20; G01L13/00; (IPC1-7): G01F1/20; G01L13/00
Attorney, Agent or Firm:
Hiroo Suzuki