To obtain a pressure sensor strong against overload by keeping a constant interval between a vibratory structure and a board during vibration.
The interval between a vibratory structure 12 and a board 20 is kept constant during vibration. The vibratory structure 12 is a linear vibrator or a rotary vibrator. The vibratory structure 12 comprises a vibratory mass 14 coupled through a spring 16 with the board 20. Vibration is excited electrostatically through an electrostatic driving section 22 where combs 24, 26 coupled, respectively, with the fixed board 20 and the mass 14 are arranged interdigitally. A pulse voltage is applied to the interdigital driving section 22 and electrostatic attraction takes place between the combs 24, 26 to induce vibration of the vibratory structure 12.
LAERMER FRANZ
SCHILP ANDREA
ELSNER BERNHARD
FREY WILHELM DR
