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Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2001349797
Kind Code:
A
Abstract:

To detect the abnormality of a diaphragm itself in a pressure sensor for outputting an electric signal on the basis of the distortion of the diaphragm deformable by pressure application.

This pressure sensor 100 comprises a piezoelectric element 3 as a distortion imparting member for forcedly distorting the diaphragm la. A voltage is applied to the piezoelectric element 3 to distort the diaphragm 1a, whereby the output from a strain gauge 1b is diagnosed.


Inventors:
YAMAUCHI SHIGENORI
ENDO NOBORU
Application Number:
JP2000169158A
Publication Date:
December 21, 2001
Filing Date:
June 06, 2000
Export Citation:
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Assignee:
DENSO CORP
International Classes:
G01L9/04; G01L9/00; G01L27/00; H01L29/84; (IPC1-7): G01L9/04; G01L27/00; H01L29/84
Attorney, Agent or Firm:
Yoji Ito (2 outside)



 
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