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Patent Searching and Data


Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2001349798
Kind Code:
A
Abstract:

To provide a pressure sensor in which the blocking of a pressure guide port is prevented, the bonding strength in the connection of a glass seat to a metal seat is improved, and the difference in bonding strength depending on solids is minimized.

This pressure sensor comprises a sensor chip having a diaphragm with a pressure detection part formed thereon and the glass seat bonded to the sensor chip and having a first pressure guide port for transmitting a pressure to the diaphragm to detect the pressure introduced through the first pressure guide port in the pressure detection part. This pressure sensor further comprises a cylindrical pipe having one end inserted and fixed to the first pressure guide port through a bonding material, so that the pressure is introduced from the other end of the pipe.


Inventors:
KAMIMURA TAKASHI
WATANABE TETSUYA
Application Number:
JP2000169287A
Publication Date:
December 21, 2001
Filing Date:
June 06, 2000
Export Citation:
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Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01L9/04; G01L13/00; H01L29/84; (IPC1-7): G01L9/04; G01L13/00; H01L29/84



 
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