To prevent a wire connected with a sensor and a diaphragm from contact causing generation of a short circuit as much as possible, in the pressure sensor of a differential pressure measurement system for measuring the pressure via a diaphragm with the sensor element.
Recessed parts 11a, and 11b in the case 10, communicating to each other are provided on a face and on the other face respectively, and a sensor element 20 is provided in a side of recess 11a in a manner intercepting the communication between both the recesses, both the recesses are filled with an oil 70, and are sealed with diaphragms 81, and 82. The sensor element 20 in the recess provided with the sensor is connected with a terminal 10a provided in the case 10 via wire 40. The pressure received by the first diaphragm 81 covering the sensor element 20 and the wire 40 is made larger than that received by the second diaphragm 82 of the opposite side.
KOIKE HARUHISA
BABA HIRONOBU
Takahiro Miura
Fumihiro Mizuno