Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2006200925
Kind Code:
A
Abstract:
To provide a pressure sensor capable of preventing a corrosive medium from intruding to the side of Ni formed by electroless plating from the interface between an Au film and an insulating film and preventing electric connection performance at bonded parts from degrading.
An Ni film 24 is made of Ni containing P of less than 4 wt%. In the case of such a structure, when the pressure sensor S1 is used in an environment of exhaust gases, ends of the Ni film 24 are made to be into a passive state within a narrow range. It is thereby possible to prevent a wide range of the ends of the Ni film 24 from altering into a layer 27 containing oxygen and prevent durability performance of an electric connection structure from degrading.
Inventors:
TOMISAKA MANABU
WATANABE YOSHIFUMI
TANAKA HIROAKI
WATANABE YOSHIFUMI
TANAKA HIROAKI
Application Number:
JP2005010342A
Publication Date:
August 03, 2006
Filing Date:
January 18, 2005
Export Citation:
Assignee:
DENSO CORP
International Classes:
G01L9/00; H01L21/60; H01L29/84
Domestic Patent References:
| JP2000216201A | 2000-08-04 | |||
| JP2002190491A | 2002-07-05 | |||
| JPH01183165A | 1989-07-20 | |||
| JPH10219469A | 1998-08-18 |
Foreign References:
| WO2004059722A1 | 2004-07-15 |
Attorney, Agent or Firm:
Yoji Ito
Takahiro Miura
Fumihiro Mizuno
Takahiro Miura
Fumihiro Mizuno