To provide a pressure sensor capable of reducing the influence, when different influences due to external stresses, such as, vibrations received by a plurality of sensor chips having each protective member provided on a pressure-receiving surface.
This sensor is equipped with a lid member 60 as a vibration suppressing member for suppressing movement of each of protective member 51, 52 vibrating in the pressure-transfer direction, when using a vertical direction to the installation surface of each of sensor chips 21, 22 on a substrate part 11 of a case 10 as the pressure-transfer direction, and at least a part is arranged, respectively in contact with each of the protective member 51, 52, and each of the protective member 51, 52 is rocked in the pressure-transfer direction. The lid member 60 has a constitution, equipped with a linear part 62 and a facing part 63 functioning for suppressing vibration of each of the protective member 51, 52.
WATANABE YOSHIFUMI
BABA HIRONOBU
Takahiro Miura
Fumihiro Mizuno