Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2011102772
Kind Code:
A
Abstract:
To provide a pressure sensor of which manufacturing is easy, pressure reception sensitivity of a diaphragm is raised, and impact resistance is sufficiently assured.
The pressure sensor 10 detects a pressure from frequency change of the pressure sensitive element based on deflection of the diaphragm 40 by forming an internal space S to seal a piezoelectric vibration member 31 of the pressure sensitive element by laminating a diaphragm 40, a framed vibrator 30 which is to be a pressure sensitive element, and a substrate 20. The pressure sensor 10 includes a stopper which suppresses such deflection as exceeds breakage limit of the diaphragm 40 in the internal space S.
Inventors:
SATO KENTA
Application Number:
JP2009258216A
Publication Date:
May 26, 2011
Filing Date:
November 11, 2009
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01L9/00
Attorney, Agent or Firm:
Yuichi Murakami
Previous Patent: DETERMINATION APPARATUS OF REDUCTION OF VACUUM OF VACUUM INSULATION SECTION AND DETERMINATION METHOD...
Next Patent: AREA FLOWMETER
Next Patent: AREA FLOWMETER