PRESSURE SENSOR - SEIKO INSTR INC

Title:

PRESSURE SENSOR

Document Type and Number:

Japanese Patent JP2013185970

Kind Code:

A

Abstract:

To obtain desired frequency characteristics while reducing a detection error or oscillation by disturbance.

A pressure sensor includes a detection circuit for detecting a difference between an output of a first pressure fluctuation sensor (P1)11a and an output of a second pressure fluctuation sensor (P2)11b. A distance G of a gap 23 of the first pressure fluctuation sensor (P1)11a and a distance G of a gap 23 of the second pressure fluctuation sensor (P2)11b are the same. A capacity V1 of a cavity 21 of the first pressure fluctuation sensor (P1)11a is made larger than a capacity V2 of a cavity 21 of the second pressure fluctuation sensor (P2)11b to provide frequency characteristics different from each other, for instance, cut-off frequencies fc1, fc2(>fc1) different from each other.

More Like This:

JPH08166308

DIFFERENTIAL-PRESSURE TRANSMISSION APPARATUS

Inventors:

UCHIYAMA TAKESHI
ARAOGI MASATAKA

Application Number:

JP2012051471A

Publication Date:

September 19, 2013

Filing Date:

March 08, 2012

Export Citation:

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Assignee:

SEIKO INSTR INC

International Classes:

G01L13/00; G01L9/00

Domestic Patent References:

JPH06324074A	1994-11-25
JP2010117184A	2010-05-27
JP2010151769A	2010-07-08

Other References:

HIDETOSHI TAKAHASHI,KIYOSHI MATSUMOTO,AND ISAO SHIMOYAMA: "“AIR PRESSURE SENSOR FOR AN INSECT WING”", TECHNICAL DIGEST OF 22ND IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, JPN6012010103, 25 January 2009 (2009-01-25), US, pages 825 - 828, ISSN: 0003202722

Attorney, Agent or Firm:

Masatake Shiga
Shingo Suzuki
Nishizawa Kazumi

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