PRESSURE SENSOR

Japanese Patent JP2013185971

A

To obtain desired frequency characteristics while reducing a detection error or oscillation by disturbance.

A pressure sensor 10 includes a detection circuit for detecting a difference between an output of a first pressure fluctuation sensor (P1)11a and an output of a second pressure fluctuation sensor (P2)11b. The first pressure fluctuation sensor (P1)11a and the second pressure fluctuation sensor (P2)11b have a lower limit frequency sensitivity, as effectively same frequency characteristics, that is equal to or larger than a specified value according to at least a capacity V of a cavity 21 or a distance G of a gap 23. The gap 23 of the first pressure fluctuation sensor (P1)11a realizes communication between the outside of the pressure sensor 10 and the inside of the cavity 21 of the first pressure fluctuation sensor (P1)11a, and the gap 23 of the second pressure fluctuation sensor (P2)11b realizes a communication between the inside of the cavity 21 of the first pressure fluctuation sensor (P1)11a and the inside of the cavity 21 of the second pressure fluctuation sensor (P2)11b.

UCHIYAMA TAKESHI
ARAOGI MASATAKA

JP2012051472A

September 19, 2013

March 08, 2012

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SEIKO INSTR INC

G01L9/00

JPH06324074A	1994-11-25
JP2010117184A	2010-05-27
JP2010151769A	2010-07-08
JP2007502416A	2007-02-08

HIDETOSHI TAKAHASHI,KIYOSHI MATSUMOTO,AND ISAO SHIMOYAMA: "“AIR PRESSURE SENSOR FOR AN INSECT WING”", TECHNICAL DIGEST OF 22ND IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, JPN6012010103, 25 January 2009 (2009-01-25), US, pages 825 - 828, ISSN: 0003202723

Masatake Shiga
Shingo Suzuki
Nishizawa Kazumi

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