Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2015064293
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To suppress the sticking of foreign matter to a metal diaphragm in a pressure sensor.SOLUTION: The pressure sensor has a sensor chip, a first housing in which the sensor chip is disposed, a second housing forming a cylindrical shape and having a hollow part and integrally assembled together with the first housing, and a metal diaphragm for dividing the hollow part of the second housing into an accommodation space in which the first housing is accommodated and an introduction space into which a measurement medium is introduced. The introduction space comprises a guidepath for guiding the measurement medium toward the metal diaphragm and a width-expanded path whose path width is expanded gradually from the guidepath to the metal diaphragm. A rough-surfaced part for trapping foreign matter mixed into the measurement medium is possessed on a width-expanded wall which is a side wall of the width-expanded path.
Inventors:
KAWADA KENJI
Application Number:
JP2013198620A
Publication Date:
April 09, 2015
Filing Date:
September 25, 2013
Export Citation:
Assignee:
DENSO CORP
International Classes:
G01L19/06; G01L19/00
Domestic Patent References:
| JP2010014464A | 2010-01-21 | |||
| JP2010019663A | 2010-01-28 | |||
| JP2009008461A | 2009-01-15 | |||
| JP2005326320A | 2005-11-24 | |||
| JPH10185723A | 1998-07-14 | |||
| JPH03245576A | 1991-11-01 | |||
| JP2011237368A | 2011-11-24 | |||
| JP2012073068A | 2012-04-12 |
Attorney, Agent or Firm:
Kazuyuki Yahagi
Taihei Nonobe
Takanori Kubo
Taihei Nonobe
Takanori Kubo