Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2016027349
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a sensor that is high in measuring accuracy, easy in manufacturing, and made inexpensively.SOLUTION: A pressure sensor comprises: a sensor substrate in which a strain gage element is provided on one element surface of a sensor wafer and a diaphragm having the thickness from the element surface to a ground and polished surface is formed by polishing the other ground and polished surface of the sensor wafer; a base substrate joined with the ground and polished surface; and a rugged pattern which is provided in the junction between the base substrate and the sensor substrate, comprises a recess including a prescribed gap and an introduction hole introducing measurement pressure in the recess, and the ground and polished surface represents the rugged pattern of the strain gage element.SELECTED DRAWING: Figure 1
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Inventors:
YOSHIDA YUSAKU
YOSHIDA TAKASHI
SUZUKI HIROSHI
YOSHIDA SHUHEI
TERASHITA HISASHI
YOSHIDA TAKASHI
SUZUKI HIROSHI
YOSHIDA SHUHEI
TERASHITA HISASHI
Application Number:
JP2015214277A
Publication Date:
February 18, 2016
Filing Date:
October 30, 2015
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01L9/00; G01L13/00; H01L29/84
Domestic Patent References:
| JP2863980B2 | 1999-03-03 | |||
| JP2602003B2 | 1997-04-23 | |||
| JP3570218B2 | 2004-09-29 | |||
| JP2007017199A | 2007-01-25 |
Foreign References:
| WO2009090851A1 | 2009-07-23 |