Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2023156122
Kind Code:
A
Abstract:
To provide a pressure sensor which can measure pressure with high accuracy and can be miniaturized.SOLUTION: A pressure sensor includes: a substrate; a cavity provided in the substrate; a cap provided on the substrate to seal the cavity; and a pressure conduit passing through the substrate and held hollow inside the cavity. The pressure conduit includes a tubular insulating layer and a piezoelectric material layer provided on the inner surface of the insulating layer and having a cavity inside. An end part is closed inside the cavity, the other end is opened wide to the outside of the substrate, and the deformation of the pressure conduit due to the pressure difference between the outside of the substrate and the inside of the cavity is detected as the voltage change in the piezoelectric material layer.SELECTED DRAWING: Figure 1
Inventors:
MARTIN WILFRIED HELLER
YAMASHITA YOSHIHISA
YAMASHITA YOSHIHISA
Application Number:
JP2022065800A
Publication Date:
October 24, 2023
Filing Date:
April 12, 2022
Export Citation:
Assignee:
ROHM CO LTD
International Classes:
G01L9/08; G01L7/04; H01L29/84
Attorney, Agent or Firm:
Norito Yamao
Shigeo Kawasaki
Haruo Nakano
Shigeo Kawasaki
Haruo Nakano