Title:
圧力センサ
Document Type and Number:
Japanese Patent JP5227729
Kind Code:
B2
Abstract:
A pressure sensor according to the present invention comprises: a differential pressure diaphragm; a static pressure diaphragm, which is provided to an outer perimeter part of the differential pressure diaphragm; a first static pressure gauge pair that is formed in the end part of the static pressure diaphragm and comprises two static pressure gauges, which are disposed such that they sandwich the differential pressure diaphragm; and a second static pressure gauge pair that is formed in the center part of the static pressure diaphragm and comprises two static pressure gauges which are disposed such that they sandwich the differential pressure diaphragm.
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Inventors:
Masayuki Yoneda
Tokuhisa Tomohisa
Tokuhisa Tomohisa
Application Number:
JP2008260954A
Publication Date:
July 03, 2013
Filing Date:
October 07, 2008
Export Citation:
Assignee:
Azbil Co., Ltd.
International Classes:
G01L9/00; G01L13/06; H01L29/84
Domestic Patent References:
| JP6213746A | ||||
| JP7086617A | ||||
| JP7311110A | ||||
| JP5273068A |
Attorney, Agent or Firm:
Ken Ieiri
Yasuhiro Iwase
Masahiro Kozou
Yuichiro Sudo
Hori Mika
Yasuhiro Iwase
Masahiro Kozou
Yuichiro Sudo
Hori Mika