Title:
圧力センサ
Document Type and Number:
Japanese Patent JP5739039
Kind Code:
B2
Abstract:
A pressure sensor has a substrate with conductor tracks for contact-connecting electrical components. The pressure sensor has a measuring element for converting a mechanical measurement variable into an electrical signal and a signal converter for processing the electrical signals from the measuring element further. Furthermore, the pressure sensor has a first diaphragm which, together with the substrate, forms a first closed cavity which contains an inert filling medium. At least one side of the measuring element of the pressure sensor, which comprises an active surface, has direct contact with the filling medium in the first cavity. The signal converter is arranged on the substrate in the form of an unhoused integrated circuit.
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Inventors:
Wolgems, Christian
Thiere, Peter
Thiere, Peter
Application Number:
JP2014085224A
Publication Date:
June 24, 2015
Filing Date:
April 17, 2014
Export Citation:
Assignee:
EPCOS AG
International Classes:
G01L13/02; G01L19/14
Domestic Patent References:
| JP2003315193A | ||||
| JP2006177919A | ||||
| JP2009514691A | ||||
| JP2005337970A | ||||
| JP2003337075A | ||||
| JP2006220430A | ||||
| JP260838U |
Foreign References:
| WO2007054070A1 |
Attorney, Agent or Firm:
Kimura Mitsuru
Takanori Mamoru
Taiji Morikawa
Amamiya Yasuhito
Kei Sakurada
Mie Hideki
Takanori Mamoru
Taiji Morikawa
Amamiya Yasuhito
Kei Sakurada
Mie Hideki