Title:
圧力センサ
Document Type and Number:
Japanese Patent JP6654157
Kind Code:
B2
Abstract:
A reference region (122) in which displacement of a diaphragm (102) is restricted is provided outside a movable region (121). In the reference region (122), a gap between the diaphragm (102) and a base (101) does not change. A first reference electrode (106) is disposed in the reference region (122) of the diaphragm (102). Further, a second reference electrode (107) is formed on the base (101) in a position facing the first reference electrode (106).
Inventors:
Tochigi Takenobu
Takuya Ishihara
Masaru Soeda
Masashi Sekine
Takuya Ishihara
Masaru Soeda
Masashi Sekine
Application Number:
JP2017005683A
Publication Date:
February 26, 2020
Filing Date:
January 17, 2017
Export Citation:
Assignee:
Azbil Co., Ltd.
International Classes:
G01L9/12
Domestic Patent References:
| JP2880798B2 | ||||
| JP2569293B2 | ||||
| JP2001356062A | ||||
| JP4014006B2 | ||||
| JP3339565B2 | ||||
| JP6568484B2 |
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa