Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH03202738
Kind Code:
A
Abstract:
PURPOSE:To make it possible to adopt Al material which can be processed easily and to make it possible to fit a structure into mass production by extending an electrode for taking out the resistance change in a strain resistor to the side of a taking- out lead wire to the frame part of a diaphragm part, and forming the electrode. CONSTITUTION:A diaphragm part 1 is constituted of a frame part 11 and a film part 12. A converting part 2 is formed of an interlayer insulating film 21, a strain resistor 22 which is connected to a bridge and formed so that the deformation of the film part 12 is transduced into resistance change, electrode 23 comprising, e.g. Al, which is connected to the strain resistor 22 and a passivation part 24 covering the strain resistor 22. In the main body 31 of a cap part 3, the lower end is exposed to the lower surface of a leg part 312, and a columnar lead 33 which is connected to an output-taking-out lead wire 32 at the upper end is housed in the leg part 312. The diaphragm part 2 and a converting part 2 are bonded by using a bonding agent (a) into a unitary body when the cover is applied thereon. At the same time, a conductive paste (b) is applied on the upper surface of the electrode 23 at the upper part of the frame part 11. The lead 33 and each electrode 23 are connected and fixed electrically by stamping. Thus, the movable degree is decreased as a whole.
Inventors:
IIDA YASUNARI
Application Number:
JP34127289A
Publication Date:
September 04, 1991
Filing Date:
December 29, 1989
Export Citation:
Assignee:
JAPAN ENGINE VALVE MFG
International Classes:
G01L7/08; G01L9/00; G01L9/04; (IPC1-7): G01L7/08; G01L9/04
Attorney, Agent or Firm:
Akira Kondo
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