Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH08128908
Kind Code:
A
Abstract:
PURPOSE: To provide a pressure sensor which makes strain amount against pressure larger, has no hysteresis, and is excellent in pressure detection accuracy in the pressure sensor using a resistor strain gauge.
CONSTITUTION: A pressure sensor is equipped with a base body 1 which is made into the shape of a circular diaphragm whose rim portion 2 is held and deforms under a pressure to be measured, and a resistor strain gauge R1 which is arranged at a portion except the rim portion 2. A thickness of a portion except the rim portion 2 of an opposite face to a face on which the resistor strain gauge R1 of the base body 1 is arranged is made thin so as to form a recessed portion 3.
Inventors:
OGINO TSUYOSHI
KAKITA KENICHI
SUGIOKA ICHIRO
TAURA MASAMITSU
KAKITA KENICHI
SUGIOKA ICHIRO
TAURA MASAMITSU
Application Number:
JP26866994A
Publication Date:
May 21, 1996
Filing Date:
November 01, 1994
Export Citation:
Assignee:
MATSUSHITA REFRIGERATION
International Classes:
G01L9/04; G01L9/00; G01L27/00; (IPC1-7): G01L9/04; G01L27/00
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
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