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Patent Searching and Data


Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH10206256
Kind Code:
A
Abstract:

To provide a pressure sensor capable of preventing surely the surface of a pressure sensitive element from dewfall and keeping preferable pressure sensing accuracy without needing the disposition of a protective film or the like.

A diaphragm 62 is provided near the pressure receiving surface 62a with an electrode 66a (66b) and an auxiliary electrode 67 formed of a material having the heat transfer rate higher than that of the electrode 66a (66b). Further, a waterdrop catching groove 68 consisting of a fine groove is provided right below the auxiliary electrode 67. When the temperature of a pressure medium is abruptly lowered, dewfalls are selectively generated on the auxiliary electrode 67 and water drops made of the dewfalls are actively guided into the same waterdrop catching groove 68 and held therein by the capillary action of the waterdrop catching groove 68.


Inventors:
SUGIMOTO MASAHIRO
Application Number:
JP656597A
Publication Date:
August 07, 1998
Filing Date:
January 17, 1997
Export Citation:
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Assignee:
TOYOTA MOTOR CORP
International Classes:
G01L9/04; G01L9/00; H01L29/84; (IPC1-7): G01L9/04; H01L29/84
Attorney, Agent or Firm:
Hironobu Onda