Title:
PRESSURE AND TEMPERATURE DISTRIBUTION MEASUREMENT SYSTEM
Document Type and Number:
Japanese Patent JP2006153672
Kind Code:
A
Abstract:
To provide a measurement system for measurement of distribution of a physical amount such as air pressure or temperature in the space in particular in a vacuum chamber.
The pressure and temperature distribution measurement system for measuring the distribution of the physical amount in a desired space is provided with a sensing unit composed of sensor chips 100 equipped on the tips of sensor support pipes 101-112 which are formed of pipes or rods and capable of maintaining each form for distributing them at the desired positions for measuring the distribution of the physical amount.
Inventors:
HONMA KOJI
MIYAZAKI MASARU
MIYAZAKI MASARU
Application Number:
JP2004345021A
Publication Date:
June 15, 2006
Filing Date:
November 29, 2004
Export Citation:
Assignee:
CHEMITORONICS CO LTD
MEMS CORE CO LTD
MEMS CORE CO LTD
International Classes:
G01D21/00; G01D21/02; G01L21/00
Domestic Patent References:
JPS62157527A | 1987-07-13 | |||
JP2003227761A | 2003-08-15 | |||
JPH07302934A | 1995-11-14 | |||
JPH06235672A | 1994-08-23 | |||
JPS5575618A | 1980-06-07 | |||
JPH11196833A | 1999-07-27 |