Title:
加圧水噴射装置及びそれを用いた基板洗浄装置
Document Type and Number:
Japanese Patent JP4435580
Kind Code:
B2
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Inventors:
Amari Masahiko
Masami Murata
Masami Murata
Application Number:
JP2004001942A
Publication Date:
March 17, 2010
Filing Date:
January 07, 2004
Export Citation:
Assignee:
Asahi Sanak Co., Ltd.
International Classes:
B08B3/02; H01L21/304; B08B3/08
Domestic Patent References:
| JP11345797A | ||||
| JP2001015473A | ||||
| JP9136070A | ||||
| JP2000138197A |
Attorney, Agent or Firm:
Tsuyoshi Sato
Kiyoshi Ogawa
Kiyoshi Ogawa