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Patent Searching and Data


Title:
PRINT PRESSURE DETECTING METHOD AND APPARATUS IN MICRO-CONTACT PRINT
Document Type and Number:
Japanese Patent JP2008062140
Kind Code:
A
Abstract:

To precisely control contact pressure to a workpiece for a stamp in a micro-contact printing method.

As a method of controlling the contact pressure of stamp 11 and the work 21 to transfer a transferring agent to the workpiece by making the stamp 11 where the transferring agent is filled and the workpiece 21 parallel with each other, relatively making the stamp 11 and the work 21 close to each other to bring the stamp 11 into contact with the work 21 at a prescribed pressure, a prescribed load is applied on the side holding the stamp 11 to detect the value as an initial pressure, the workpiece 21 arranged below the stamp 11 is moved upward to further apply the contact pressure to the stamp 11, the contact pressure is detected and the difference between the initial pressure applied to the side of holding the stamp and the contact pressure is detected as the printing pressure.


Inventors:
Yokoyama, Yasuaki
Application Number:
JP2006000240725
Publication Date:
March 21, 2008
Filing Date:
September 05, 2006
Export Citation:
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Assignee:
NANOMETRIC TECHNOLOGY INC
International Classes:
B05D1/28; B82B3/00; G01L5/00; H01L21/027