Title:
透明導電性酸化物層をエッチングするための印刷可能な媒体
Document Type and Number:
Japanese Patent JP5190063
Kind Code:
B2
Abstract:
The present invention relates to novel printable etching media having improved properties for use in the process for the production of solar cells. These are corresponding particle-containing compositions by means of which extremely fine lines and structures can be etched very selectively without damaging or attacking adjacent areas.
Inventors:
Stockum, Verner
Cubelbeck, Armin
Cubelbeck, Armin
Application Number:
JP2009534999A
Publication Date:
April 24, 2013
Filing Date:
October 05, 2007
Export Citation:
Assignee:
Merck Patent Gesellschaft mit beschraenkter Haftung
International Classes:
H01L21/308; C09K13/04; C23F1/30; H01L31/04
Domestic Patent References:
| JP1147078A | ||||
| JP817789A | ||||
| JP5613789A |
Foreign References:
| US3904443 | ||||
| WO2007003255A1 | ||||
| WO2007009546A1 | ||||
| WO2007012378A1 | ||||
| WO2008052636A1 |
Attorney, Agent or Firm:
Akio Miyazaki
Ishibashi Masayuki
Masaaki Ogata
Ishibashi Masayuki
Masaaki Ogata