Title:
プローブカード及び検査装置
Document Type and Number:
Japanese Patent JP5312227
Kind Code:
B2
Abstract:
An automatic switching mechanism is controlled by a probe card independent from a tester without limitation of the number of control signals from the tester. A probe card and an inspection apparatus include probes to be brought into contact with electrodes of inspection targets and a power supply channel electrically connecting the probes to a tester. The automatic switching mechanism divides each of the power supply channels into a plurality of power supply wiring portions, which are respectively connected to the probes; and shuts off the power supply wiring responsive to electrical fluctuation such as overcurrent. An electrical fluctuation detection mechanism detects an electrical fluctuation due to a defective product among the inspection targets. A control mechanism, responsive to detection of an electrical fluctuation, shuts off the power supply wiring portion if the electrical fluctuation is caused by the automatic switching mechanism.
Inventors:
Ishigaki Tatsuo
Katsushi Hoshi
Akabira Akihisa
Katsushi Hoshi
Akabira Akihisa
Application Number:
JP2009153892A
Publication Date:
October 09, 2013
Filing Date:
June 29, 2009
Export Citation:
Assignee:
Nippon Micronics Co., Ltd.
International Classes:
G01R31/28; G01R1/073; H01L21/66
Domestic Patent References:
| JP2006058104A | ||||
| JP6151531A | ||||
| JP6053299A |
Attorney, Agent or Firm:
Nobuyuki Kudo
Yusuke Wakabayashi
Yusuke Wakabayashi