Title:
PROBE CARD, MEASURING DEVICE AND MEASURING METHOD OF ELECTRONIC CIRCUIT DEVICE
Document Type and Number:
Japanese Patent JP2002311054
Kind Code:
A
Abstract:
To provide a probe card, and a measuring device and measuring method for an electronic circuit device used for measuring electric characteristics of the electric circuit device such as a semiconductor chip capable of securely detecting contact failure between the electric circuit device and the probe card, and accurately measuring the electric characteristics of the electric circuit device.
A substrate 22, a probe pin 26 held on the substrate so as to be in contact with a pad formed on a chip, and a dummy pin 26 held on the substrate 22 so as to be in contact with the pad formed on the chip for scratching a surface of the pad are included.
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Inventors:
ONO KOICHIRO
Application Number:
JP2001111562A
Publication Date:
October 23, 2002
Filing Date:
April 10, 2001
Export Citation:
Assignee:
SONY CORP
International Classes:
G01R1/073; G01R31/28; H01L21/66; G01R31/26; (IPC1-7): G01R1/073; G01R31/26; G01R31/28; H01L21/66
Attorney, Agent or Firm:
Takahisa Sato