Title:
PROBE AND PROBE CARD TO USE THE SAME
Document Type and Number:
Japanese Patent JP2001041978
Kind Code:
A
Abstract:
To provide probes highly densely, to perform elastic deformation with a margin during overdriving, and to facilitate one-by-one replacement.
This probe card is provided with a substrate 300 in which a wiring pattern 310 is formed, a plurality of probes 100 electrically connected to the wiring pattern 310 and arranged in such a way as to be drooped down from the substrate 300, and a probe supporting member 200 provided on the lower surface side of the substrate 300 to support the probes 100. The probes 100 comprises two bent parts 142A and 142B formed in such a way as to be bent inversely with respect to each other at angles of 90° or more at the tip of the probes 100 protruded more downward than the probe supporting member 200.
Inventors:
OKUBO MASAO
OKUBO KAZUMASA
IWATA HIROSHI
OKUBO KAZUMASA
IWATA HIROSHI
Application Number:
JP21685199A
Publication Date:
February 16, 2001
Filing Date:
July 30, 1999
Export Citation:
Assignee:
JAPAN ELECTRONIC MATERIALS
International Classes:
G01R1/067; G01R1/073; H01L21/66; (IPC1-7): G01R1/067; G01R1/073; H01L21/66
Attorney, Agent or Firm:
Koji Onishi (1 outside)